Array

UNESP
AUIN | Agência Unesp de Inovação
   

Tecnology

  AUTOMATIC EQUIPMENT FOR SLIM FILMS DEPOSITION  

Carimbo Unesp

attractive aesthetics

Functionality
Engineering and Instrumentation
PROBLEM

 

The technology of slim films and semiconductors became very important in modern industry, since many electronic devices functions because of this technology applied to semiconductors. Different technologies are used by the industry for deposit of slim films, being the SILAR, dip-coating and electro-deposition the highlighted techniques. Each of this perform the formation of slim films in different ways, varying the precursor and the chemical reactions that occurs in the process. This new technique executes the early mentioned deposition techniques in the same equipment and in the same sample, allowing to deposit different material layers and with different techniques, in a totally automatic way.

 

 

SOLUTION

 

This new technique allow the deposition of slim films in an automatic way, executing the SILAR, dip-coating and electro-deposition techniques in a single equipment and sample, benefiting the deposition of different material layers, with different techniques, such as the application of hybrid techniques using various materials in the same time.

 

 


Idea

Laboratory

Prototype

Scheduling

Market
Agency Code
15AUIN042
Patent
BR102015027491-2

Agência Unesp de Inovação

Tel: +55 11 5627.0696

auin@unesp.br

https://auin.unesp.br

Date of deposit
29/10/2015
Inventor(s)

Mirko Congiu

Carlos F. De Oliveira Graeff

FAPESP
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